Single step fabrication of Silicon resistors on SOI substrate used as Thermistors
Rollo, Serena, Rani, Dipti, Olthuis, Wouter, Pascual García, CésarVolume:
9
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/s41598-019-38753-x
Date:
December, 2019
File:
PDF, 2.95 MB
english, 2019