Material Parameter Extraction for Complex AlScN Thin Film...

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Advanced Electronic Materials 2019 / 03

Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling

Parsapour, Fazel, Pashchenko, Vladimir, Kurz, Nicolas, Sandu, Cosmin Silviu, LaGrange, Thomas, Yamashita, Kaoru, Lebedev, Vadim, Muralt, Paul
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Journal:
Advanced Electronic Materials
DOI:
10.1002/aelm.201800776
Date:
March, 2019
File:
PDF, 1.44 MB
2019
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