Effect of Low Temperature RF Plasma Treatment on Electrical...

ECS Journal of Solid State Science and Technology 2019 Vol. 8; Iss. 2

Effect of Low Temperature RF Plasma Treatment on Electrical Properties of Junctionless InGaAs MOSFETs

Gomeniuk, Y. V., Gomeniuk, Y. Y., Rudenko, T. E., Okholin, P. N., Glotov, V. I., Nazarova, T. M., Djara, V., Cherkaoui, K., Hurley, P. K., Nazarov, A. N.
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Volume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0181902jss
File:
PDF, 1.23 MB
english, 2019
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