[IEEE Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics - Chiba, Japan (15-19 July 2001)] Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557) - Highly efficient electric-discharge ArF and KrF excimer lasers with He as a buffer gas
Razhev, A.M., Bagayev, S.N., Zhupikov, A.A.Volume:
2
Year:
2001
DOI:
10.1109/cleopr.2001.970809
File:
PDF, 147 KB
2001