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Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling
Mathioudaki, Stella, Vandenabeele, Cédric, Tonneau, Romain, Pflug, Andreas, Lucas, StéphaneVolume:
37
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5064690
Date:
May, 2019
File:
PDF, 5.12 MB
2019