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Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication
Khakifirooz, Marzieh, Chien, Chen-Fu, Fathi, MahdiYear:
2019
Language:
english
Journal:
IEEE Transactions on Automation Science and Engineering
DOI:
10.1109/TASE.2019.2894668
File:
PDF, 10 KB
english, 2019