Picosecond laser drilling of silicon with applied voltage
Jiao, Lishi, Zheng, Hongyu, Zhang, Yilei, Ng, Eddie Yin KweeVolume:
1
Language:
english
Journal:
SN Applied Sciences
DOI:
10.1007/s42452-018-0091-y
Date:
January, 2019
File:
PDF, 1.30 MB
english, 2019