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Hot wire chemical vapor deposition for silicon photonics: An emerging industrial application opportunity
Tarazona, A., Bucio, T. Domínguez, Oo, S.Z., Petra, R., Khokhar, A.Z., Boden, Stuart A., Gardes, F.Y., Reed, G.T., Chong, H.M.H.Volume:
676
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.02.048
Date:
April, 2019
File:
PDF, 1.18 MB
english, 2019