Catalytic Chemical Vapor Deposition (Technology and...

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Catalytic Chemical Vapor Deposition (Technology and Applications of Cat-CVD) || Physics and Technologies for Operating Cat-CVD Apparatus

Matsumura, Hideki, Umemoto, Hironobu, Gleason, Karen K., Schropp, Ruud E.I.
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Volume:
10.1002/97
Year:
2019
Language:
english
DOI:
10.1002/9783527818655.ch7
File:
PDF, 2.50 MB
english, 2019
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