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Microstructures and electrical properties of nanostructured Cr2O3 thin films deposited by dual-target reactive high-power impulse magnetron sputtering
Zhu, Mingdong, Li, Fei, Zhou, Guangxue, Jin, Xiao, Wang, Xiaofeng, Wang, Langping, Song, FalunVolume:
164
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.03.035
Date:
June, 2019
File:
PDF, 5.46 MB
2019