Effect of annealing conditions on dopants activation and...

AIP Advances 2019 / 01 Vol. 9; Iss. 1

Effect of annealing conditions on dopants activation and stress conservation in silicon-germanium

Kuo, Tai-Chen, Jhong, Kai-Jyun, Lin, Chia-Wei, Lee, Wen-Hsi
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Volume:
9
Journal:
AIP Advances
DOI:
10.1063/1.5053237
Date:
January, 2019
File:
PDF, 6.13 MB
2019
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