A set of cross sections and transport coefficients for CF3+ ions in CF4
Jovanovic, Jasmina V, Stojanović, Vladimir, Raspopovic, Zoran, de Urquijo, J., Petrovic, Zoran LjJournal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab122f
Date:
March, 2019
File:
PDF, 273 KB
2019