Structural and electrical properties of AlN thin films on...

Materials Science in Semiconductor Processing 2019 / 07 Vol. 97

Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition

Schilirò, Emanuela, Giannazzo, Filippo, Bongiorno, Corrado, Di Franco, Salvatore, Greco, Giuseppe, Roccaforte, Fabrizio, Prystawko, Pawel, Kruszewski, Piotr, Leszczyński, Mike, Krysko, Marcin, Michon,
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Volume:
97
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.03.005
Date:
July, 2019
File:
PDF, 1.34 MB
english, 2019
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