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CMUT with mechanically coupled plate actuators for low frequencies
Krenkel, Marcel, Stolz, Michael, Koch, Sandro G, Kupnik, MarioVolume:
29
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/ab035d
Date:
April, 2019
File:
PDF, 1.50 MB
2019