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Foundry developments towards silicon nitride photonics from visible to the mid-infrared
Munoz, Pascual, Van Dijk, Paulus W. L., Geuzebroek, Douwe, Geiselmann, Michael, Dominguez, Carlos, Stassen, Andim, Domenech, David, Zervas, Michael, Leinse, Arne, Roeloffzen, Chris G. H., Gargallo, BeYear:
2019
Journal:
IEEE Journal of Selected Topics in Quantum Electronics
DOI:
10.1109/JSTQE.2019.2902903
File:
PDF, 4.27 MB
2019