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[ASME ASME 2009 International Manufacturing Science and Engineering Conference - West Lafayette, Indiana, USA (October 4–7, 2009)] ASME 2009 International Manufacturing Science and Engineering Conference, Volume 1 - An Economic Study on Chemical Mechanical Polishing of Silicon Wafers
Baisie, Emmanuel A., Yang, Man, Kaware, Ravindra, Hooker, Maria, Li, Z. C., Sun, Wangping, Zhang, X. H.Year:
2009
DOI:
10.1115/msec2009-84072
File:
PDF, 294 KB
2009