Influence of substrate holder configurations on bias...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2019 / 03 Vol. 37; Iss. 2

Influence of substrate holder configurations on bias enhanced nucleation area for diamond heteroepitaxy: Toward wafer-scale single-crystalline diamond synthesis

Yoshikawa, Taro, Herrling, David, Meyer, Frank, Burmeister, Frank, Nebel, Christoph E., Ambacher, Oliver, Lebedev, Vadim
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Volume:
37
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5086020
Date:
March, 2019
File:
PDF, 2.49 MB
2019
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