Micro-Tethering for Fabrication of Encapsulated Inertial Sensors With High Sensitivity
Flader, Ian B., Chen, Yunhan, Yang, Yushi, Ng, Eldwin J., Shin, Dongsuk D., Heinz, David B., Ortiz, Lizmarie Comenencia, Alter, Anne L., Park, Woosung, Goodson, Kenneth E., Kenny, Thomas W.Year:
2019
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2019.2900761
File:
PDF, 3.20 MB
english, 2019
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