The Influence of the Dopant Concentration in a Silicon Film on the Magnetic Sensitivity of SOI Field-Effect Hall Sensors
Korolev, M. A., Kozlov, A. V., Krasukov, A. Y., Devlikanova, S. S.Volume:
47
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S1063739718070065
Date:
November, 2018
File:
PDF, 466 KB
english, 2018