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Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography
Song, Ying, Bayanheshig,, Li, Shuo, Jiang, Shan, Wang, WeiJournal:
Photonic Sensors
DOI:
10.1007/s13320-019-0537-x
Date:
March, 2019
File:
PDF, 2.52 MB
2019