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[IEEE 2018 IEEE Energy Conversion Congress and Exposition (ECCE) - Portland, OR (2018.9.23-2018.9.27)] 2018 IEEE Energy Conversion Congress and Exposition (ECCE) - Pulse Current Generator with Improved Waveform Fidelity for High Voltage Capacitively-Coupled Plasma System
Chae, Beomseok, Min, Juhwa, Suh, Yongsug, Kim, Hyejin, Kim, HyunbaeYear:
2018
Language:
english
DOI:
10.1109/ecce.2018.8558425
File:
PDF, 1.21 MB
english, 2018