Fabrication and replication of re-entrant structures by...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2018 / 11 Vol. 36; Iss. 6

Fabrication and replication of re-entrant structures by nanoimprint lithography methods

Kehagias, Nikolaos, Francone, Achille, Guttmann, Markus, Winkler, Frank, Fernández, Ariadna, Sotomayor Torres, Clivia M.
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5048241
Date:
November, 2018
File:
PDF, 2.02 MB
english, 2018
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