Analysis of multipole fields for a practical wire lens of...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2019 / 01 Vol. 37; Iss. 1

Analysis of multipole fields for a practical wire lens of an aberration corrector

Nakano, Tomonori, Yamazawa, Yu
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5065554
Date:
January, 2019
File:
PDF, 1.50 MB
english, 2019
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