[IEEE 2018 IEEE Nanotechnology Symposium (ANTS) - Albany, NY, USA (2018.11.14-2018.11.15)] 2018 IEEE Nanotechnology Symposium (ANTS) - Characterization of N type Si doped ZnO and ZnO thin films deposited by RF magnetron sputtering
Claypoole, Jesse, Altwerger, Mark, Flottman, Spencer, Efstathiadis, HarryYear:
2018
Language:
english
DOI:
10.1109/NANOTECH.2018.8653571
File:
PDF, 480 KB
english, 2018