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Ultraprecision Micro Machining of Structures with High Aspect Ratio.
SUZUKAWA, Hajime, TAKEUCHI, Yoshimi, SAWADA, Kiyoshi, KAWAI, Tomohiko, SAKAIDA, YasuhiroVolume:
68
Year:
2002
Language:
english
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.68.1470
File:
PDF, 10.08 MB
english, 2002