Predicting radiation-induced carbon contamination of EUV...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2019 / 03 Vol. 37; Iss. 2

Predicting radiation-induced carbon contamination of EUV optics

Hollenshead, Jeromy T., Klebanoff, Leonard E., Delgado, Gil
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5072797
Date:
March, 2019
File:
PDF, 2.42 MB
english, 2019
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