[IEEE 2019 IEEE Conference of Russian Young Researchers in...

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[IEEE 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Saint Petersburg and Moscow, Russia (2019.1.28-2019.1.31)] 2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus) - Research of Reconstructed Wafer Surface Planarity on the Metall-Compound-Silicon Boundary for Multi-Chip Module with Embedded Dies

Pogudkin, Alexander V., Belyakov, Ivan A., Vertyanov, Dmitry V., Kruchinin, Sergei M., Timoshenkov, Sergei P.
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Year:
2019
DOI:
10.1109/EIConRus.2019.8657106
File:
PDF, 702 KB
2019
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