A set of cross sections and transport coefficients for CF3+...

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Plasma Sources Science and Technology 2019 / 03

A set of cross sections and transport coefficients for CF3+ ions in CF4

Jovanovic, Jasmina V, Stojanović, Vladimir, Raspopovic, Zoran, de Urquijo, J., Petrovic, Zoran Lj
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Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab122f
Date:
March, 2019
File:
PDF, 273 KB
english, 2019
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