Mechanism of stress induced leakage current in Si3N4

Materials Research Express 2019 / 03

Mechanism of stress induced leakage current in Si3N4

Gritsenko, Vladimir A, Gismatulin, Andrei, Baraban, Alexander, Chin, Albert
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Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/ab1223
Date:
March, 2019
File:
PDF, 612 KB
english, 2019
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