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Growth of 2-Inch α-Ga 2 O 3 Epilayers via Rear-Flow-Controlled Mist Chemical Vapor Deposition
Kim, Kyoung-Ho, Ha, Minh-Tan, Kwon, Yong-Jin, Lee, Heesoo, Jeong, Seong-Min, Bae, Si-YoungVolume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0301907jss
File:
PDF, 953 KB
english, 2019