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High Speed Positioning of Linear Motor Driving Table by Using Model Reference Feedforward Control.
MIYAGAWA, Hidekazu, YAMAMOTO, Akihiro, HAMAMATSU, Hiroshi, SUMIMOTO, Tadashi, GOTO, Satoru, NAKAMURA, MasatoshiVolume:
68
Year:
2002
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.68.977
File:
PDF, 2.56 MB
2002