High temperature oxidation pre-treatment of textured c-Si...

Materials Science in Semiconductor Processing 2019 / 07 Vol. 97

High temperature oxidation pre-treatment of textured c-Si wafers passivated by a-Si:H

Limodio, G., D'Herouville, G., Mazzarella, L., Zhao, Y., Yang, G., Isabella, O., Zeman, M.
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Volume:
97
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.03.008
Date:
July, 2019
File:
PDF, 983 KB
english, 2019
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