Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2019 / 05 Vol. 446
![](/img/cover-not-exists.png)
Swift heavy ion irradiation assisted Si nanoparticle formation in HfSiOx nano-composite thin films deposited by RF magnetron sputtering method
Dhanunjaya, M., Vinod Kumar, K., Manikanthababu, N., Nageswara Rao, S.V.S., Pathak, A.P.Volume:
446
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2019.03.027
Date:
May, 2019
File:
PDF, 5.71 MB
english, 2019