An Optical MEMS Acoustic Sensor Based on Grating...

Sensors 2019 / 03 Vol. 19; Iss. 7

An Optical MEMS Acoustic Sensor Based on Grating Interferometer

Zhang, Mengying, Wu, Gaomi, Ren, Dipeng, Gao, Ran, Qi, Zhi-Mei, Liang, Xingdong
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Volume:
19
Language:
english
Journal:
Sensors
DOI:
10.3390/s19071503
Date:
March, 2019
File:
PDF, 2.90 MB
english, 2019
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