Research on processing technology of beam membrane...

Modern Physics Letters B 2019 / 03 Vol. 33; Iss. 8

Research on processing technology of beam membrane structure based on porous silicon

Shang, Ying-Qi, Zhang, Lin-Chao, Qi, Hong, Wu, Ya-Lin, Zhang, Yan, Zhang, Peng, Chen, Jing, Jiang, Xiao-Long, Tong, Yong, Xu, Hai-Xin
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Volume:
33
Language:
english
Journal:
Modern Physics Letters B
DOI:
10.1142/S0217984919500921
Date:
March, 2019
File:
PDF, 1.70 MB
english, 2019
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