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Fluid load augmented micro balance
Neriya Hegade, Keshava Praveena, Packirisamy, Muthukumaran, Bhat, RamaLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-04289-9
Date:
January, 2019
File:
PDF, 585 KB
english, 2019