Vacuum packaged electromagnetic 2D scanning micromirror

Sensors and Actuators A: Physical 2019 / 05 Vol. 290

Vacuum packaged electromagnetic 2D scanning micromirror

Chung, Seung-Han, Lee, Seung-Ki, Ji, Chang-Hyeon, Park, Jae-Hyoung
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
290
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.03.021
Date:
May, 2019
File:
PDF, 3.48 MB
english, 2019
Conversion to is in progress
Conversion to is failed