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Vacuum packaged electromagnetic 2D scanning micromirror
Chung, Seung-Han, Lee, Seung-Ki, Ji, Chang-Hyeon, Park, Jae-HyoungVolume:
290
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.03.021
Date:
May, 2019
File:
PDF, 3.48 MB
english, 2019