Effect of furnace annealing on the ferroelectricity of...

Thin Solid Films 2019 / 05 Vol. 677

Effect of furnace annealing on the ferroelectricity of Hf0.5 Zr0.5O2 thin films

Shekhawat, Aniruddh, Walters, Glen, Chung, Ching-Chang, Garcia, Roberto, Liu, Yang, Jones, Jacob, Nishida, Toshikazu, Moghaddam, Saeed
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Volume:
677
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.03.031
Date:
May, 2019
File:
PDF, 2.57 MB
english, 2019
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