Short channel monolayer MoS2 field-effect transistors...

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Nanotechnology 2019 / 03

Short channel monolayer MoS2 field-effect transistors defined by SiOx nanofins down to 20 nm

Bi, kaixi, Liu, Huaizhi, Chen, Yiqin, Luo, Fang, Shu, Zhiwen, Lin, Jun, Liu, Song, Liu, Huawei, Zeng, Zanyang, Dai, Peng, Zhu, Mengjian, Duan, Huigao
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Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/ab13cc
Date:
March, 2019
File:
PDF, 1.03 MB
english, 2019
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