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Effects of process conditions on the chemistry of an Ar/C 2 H 2 dust‐forming plasma
Denysenko, Igor B., Wahl, Erik, Labidi, Safa, Mikikian, Maxime, Kersten, Holger, Gibert, TitaϊnaLanguage:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201800209
Date:
April, 2019
File:
PDF, 552 KB
english, 2019