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Modeling and physical analysis of an out-of-plane capacitive MEMS transducer with dynamically coupled electrodes
Bosetti, Gabriele, Manz, Johannes, Dehé, Alfons, Krumbein, Ulrich, Schrag, GabrieleLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-04290-2
Date:
March, 2019
File:
PDF, 1.89 MB
english, 2019