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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - 65nm Device Characteristics Matching on Single and Batch System Ion Implanter
Okabe, Ken-ichi, Miura, Ryuichi, Kase, MasatakaVolume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401600
File:
PDF, 720 KB
english, 2006