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Full Custom MEMS Design: 2.5D Fabrication-Process Simulation for 3D Field-Solver-Based Circuit Extraction
Hald, Axel, Marquardt, Hartmut, Herzogenrath, Pekka, Scheible, Jurgen, Lienig, Jens, Seelhorst, JohannesYear:
2019
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2019.2906060
File:
PDF, 1.84 MB
english, 2019