Effect of oxygen precipitation through annealing process on...

Japanese Journal of Applied Physics 2019 / 04 Vol. 58; Iss. SB

Effect of oxygen precipitation through annealing process on lifetime degradation by Czochralski-Si crystal growth conditions

Kinoshita, Kosuke, Kojima, Takuto, Onishi, Kohei, Ohshita, Yoshio, Ogura, Atsushi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/aaf87b
Date:
April, 2019
File:
PDF, 1.24 MB
english, 2019
Conversion to is in progress
Conversion to is failed