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On the Planarization Mechanism and Pad Aging Effects of Soft Pad Polishing: A Perspective from the Micro-Mechanical Properties of Soft Pads
Jeng, Yeau-Ren, Tsai, Ping-Chi, Lin, Yu-ZhengLanguage:
english
Journal:
Journal of Tribology
DOI:
10.1115/1.4043348
Date:
March, 2019
File:
PDF, 855 KB
english, 2019