Spectral Ellipsometry Study of Silicon Surfaces Implanted with Oxygen and Helium Ions
Bazarov, V. V., Nuzhdin, V. I., Valeev, V. F., Lyadov, N. M.Language:
english
Journal:
Journal of Applied Spectroscopy
DOI:
10.1007/s10812-019-00793-6
Date:
April, 2019
File:
PDF, 356 KB
english, 2019