Effect of Energy per Atom (E/n) in the Ar-Gas Cluster Ion Beam (Ar-GCIB) and O2+ Cosputter Process
Wang, Shin-Kung, Chang, Hsun-Yun, Chu, Yi-Hsuan, Kao, Wei-Lun, Wu, Chen-Yi, Lee, Yi-Wei, You, Yun-Wen, Chu, Kuo-Jui, Hung, Shu-Hang, Shyue, Jing-JongYear:
2019
Language:
english
Journal:
The Analyst
DOI:
10.1039/c8an02452a
File:
PDF, 747 KB
english, 2019