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Highly controllable and reliable ultra-thin Parylene deposition
Liu, Yaoping, Kang, Dongyang, Dai, Wangzhi, Li, Haida, Wang, Wei, Tai, Yu-ChongVolume:
6
Language:
english
Journal:
Micro and Nano Systems Letters
DOI:
10.1186/s40486-018-0067-0
Date:
December, 2018
File:
PDF, 1.34 MB
english, 2018