Synthesis, Characterization and Lithography Performance of Photoacid Generator with Short Perfluoroalkyl Anion
Kyung-Min Kim, Ramakrishnan Ayothi, Christopher K. OberVolume:
55
Language:
english
Pages:
8
DOI:
10.1007/s00289-005-0444-8
Date:
November, 2005
File:
PDF, 243 KB
english, 2005