Lab-scale prototyping of polymer based microfluidic devices using gallium as phase-changing sacrificial material
Hintermüller, Marcus A., Jakoby, BernhardLanguage:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.03.025
Date:
March, 2019
File:
PDF, 1.14 MB
english, 2019